Jan2021
Process Technology, a leading manufacturer of inline, ultra-high purity heaters for the semiconductor industry, is excited to announce its new family of SHX and SHX-EX heaters for IPA and flammable solvents. This new line of low internal volume heaters is integral to ultra-high purity (UHP) solvent heating applications used for semiconductor manufacturing, including wafer cleaning, etching, and photoresist stripping processes.
“Safely heating IPA and low flash-point solvents is paramount in our unique design.” States Doreen Langa, Sr. Product Manager. “Our patented purge system, indirect heating, and low watt density provide multi-level assurances for safe operation. Explosion-proof certification is also available.”
SHX’s advanced cleanliness design features a compact, indirect, ultra-pure, inline flow path – free of contact with O-rings. Patented purge technology eliminates risks associated with high-temperature fluid permeation and offers the assurance of immediate leak discovery.
Additional product specifications:
Engineered to meet the highest performance, cleanliness, and safety standards; The SHX heater family is an optimal heating solution. Class 100 cleanroom assembled.
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