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Nexus

Nexus

Multi-loop chemical heater

Engineered for your process - manage multiple chambers with one precise and stable heater! Building off of the popular SHC product line, the Nexus incorporates the same safe indirect heating technology to heat multiple process loops. Using a single heat source, the Nexus improves chamber-temperature matching performance for advanced processing requirements. PFA wetted surfaces. Low-watt denisty design for lower surface temperatures. Heats up to 176°F (80°C)

Applications

  • Semiconductor Wafer Cleaning
  • Point of Use Heating (POU)

Product Information

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