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XC Series

XC Series

Ultra-high purity heat exchanger

With a PFA tube-side fluid path the XC Series will meet the most stringent cleanliness requirements to support the next generation semiconductor node technologies. Compact design. Ideal for one-pass cooling of chemicals dumping to waste stream and innovatively eliminates high costs associated with water aspiration. Less surface area required for same BTU exchange compared to most other fluoropolymer exchangers.

Temperature range: -60°F (-50°C) to 302°F (150°C)

Applications

  • Semiconductor Wafer Cleaning

Product Information

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