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SHX

SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA), meeting the most stringent cleanliness requirements to support next generation semiconductor node technologies.

The newest Process Technology inline solvent heater. SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA), meeting the most stringent cleanliness requirements to support next generation semiconductor node technologies. Chemistry contained within high-purity PTFE components – no contact with any metals. Supports recirculating and single pass flow requirements. This is the ultimate in high-purity solvent heating! Ask about our customized to your tool and explosion proof design (SHX-EX) options. Heats up to 194°F (90°C)

Applications

  • Semiconductor Wafer Cleaning
  • Flammable Solvent Heating
  • Acid Heating and Corrosive Chemical Heating
  • UltraHigh Purity Heating
  • Chemical Heating

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