SHX inline heater is a compact, high-performance semiconductor heater engineered to safely heat isopropyl alcohol (IPA) and other high-purity chemicals used in advanced manufacturing. It is built with PTFE-based wetted components that ensure a completely metal-free flow path, eliminating contamination and maintaining purity in critical process environments.
Developed to meet next-generation semiconductor node requirements, the SHX inline heater delivers precise, uniform heating performance up to 194°F (90°C). Its design supports both recirculating and single-pass flow systems, providing flexibility for integration into a variety of process tools and cleanroom applications.
Key Features and Benefits
» Metal-free PTFE construction for ultra-clean chemical heating
» Compact, high-efficiency design for semiconductor tool integration
» Explosion-proof variant (SHX-EX) available for flammable solvent heating
» Stable temperature control for consistent process performance
» Customizable configurations for recirculating or single-pass flow setups
| Feature | Specification |
|---|---|
| Heating Capability | Up to 194°F (90°C) |
| Wetted Material | High-purity PTFE |
| Flow Configuration | Recirculating / Single-pass |
| Explosion-Proof Version | Available (SHX-EX) |
| Target Industry | Semiconductor and chemical processing |
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