SHX / SHX-EX Ultra-High Purity Solvent Heaters

NEW - Safely Heat IPA and Flammable Solvents

Product Description

The SHX portfolio of in-line, ultra-high purity heaters is designed to safely heat IPA and low flash-point solvents, meeting the most stringent cleanliness requirements to support next-generation semiconductor node technologies. Suitable for recirculating and single-pass flow requirements, these compact, low-mass heaters deliver fast heat-up with quick responsiveness to flow changes. SHX is the ULTIMATE in ultra-high purity solvent heating! Explosion proof (EX) versions available.

Applications

  • Semiconductor wafer cleaning

Features

  • Dedicated Ultra-Pure Flow Path for Advanced Cleanliness (UHP)
    • Class 1 cleanroom assembled
    • Chemistry contained within high-purity PTFE components – no contact with any metals.
    • No wetted o-ring seals eliminate source for contamination.
    • Purge design provides early notification in the unlikely event of fluid path breach.
  • Advanced Heating Design Ensures Safety
    • Indirect heat - heating element is isolated from fluid path for safe heating of flammable chemistries.
    • Low watt density eliminates localized hot spots enabling IPA to be heated to near boiling temperatures without generating gas.
    • Redundant sensors provide proper monitoring of temperature for safe operation.
    • SHX certified to: UL 499 (ETL) and CE (pending), SEMI S2/S3 (pending).
    • Explosion Proof SHX-EX certified to: UL499 (ETL) and CE (pending), SEMI S2/S3 (pending), ATEX II 2 G Ex db IIA T4 Gb (pending).
  • Precise and Stable Temperature Control in Compact Design
    • Low-mass design assures - fast initial heat-up, minimal temperature overshoot and quick response to flow change

Specifications

  • Wetted Surfaces: PTFE
  • Power Range: 3 kw, 6kw, 9kw, 12kw
  • Voltages: 200 volts to 480 volts, single phase or 3 phase
  • Temperature Range: Up to 90ºC (194ºF)
  • Max Pressure:
    • 689 kPa (99.93 PSI) at 93°C (199.4°F)
  • Fluid Connections (inlet/outlet Sizes/Types):
    • Flared - flaretek®: 1/2 inch, 3/4 inch, or 1 inch
    • Super 300 Type Pillar®: 1/2 inch, 3/4 inch or 1 inch Super 300 Type Pillar®
    • Drain: 3/8 inch, or 1/2 inch flared or Super 300 Type Pillar®
  • Mounting: vertical
    • PFA and PTFE fluoropolymer
  • SHX Dimensions: 23.1” x 7.5” x 8.0” (H x D x W), 556 mm x 190.5 mm x 203 mm
  • SHX-EX Dimensions: 27.4: x 7.6” x 8.0” (H x D x W), 696 mm x 193 mm x 203 mm
  • Watt Density: ≤ 10.0 watts/in²

Related Documents

Related Products